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Both glass substrates (industrial quality microscope slides) and
quartz ampoules were cleaned especially carefully using the
following steps:
- Immersing in "aqua regia" for minimally 24
hours
- Mechanical washing and rinsing by water-detergent solution
(substrates only)
- Rinsing by demineralised water (both substrates and ampoules)
- Rinsing by isopropyl alcohol (both substrates and ampoules)
- Drying of substrates on centrifuge to remove remaining isopropyl
alcohol
- Final surface enhancing of substrates in TESLA 214 VT
plasmatic etching device (10-12 minutes, residual pressure 1-3
Pa) immediately before films deposition
root
2002-05-23