Rastering Electron Microscopy

Selected microoptical elements were also tested and characterized by Rastering or Scanning Electron Microscopy (REM or SEM). To avoid unwanted local charging, sputtering a very thin gold film (20-30 nm) was applied to increase the sample conductivity. The gold thickness was estimated from calibration time-thickness curves based on precedent measurements with dynamic weigh system MSV-1843/A by MIKI-FFV based on detuning of the silicon oscillator. The Rastering Electron Microscope system used was manufactured by Cambridge Instruments corp.